A New Sputtering Apparatus

ثبت نشده
چکیده

The writer, in sputtering a large number of mirrors, has found that the apparatus and methods to be described have several advantages, particularly where very large and perfect mirrors are desired. The accompanying diagram will be self explanatory, and the dimensions given have been found convenient for mirrors up to 10 cm diameter. The apparatus has been designed to avoid the use of any grease or .wax, except shellac, which is not objectionable, and which is used wherever a cement is necessary. The sputtering chamber consists of a large bottle from which the bottom has been cut with a hot wire, the irregular rim being ground flat with moderately fine emery. The ground rim should not exceed 3 mm in width and may be bevelled down to this dimension if necessary. This rim rests on a ring of gasket rubber, 1 cm wide, which is cemented to a thick aluminum plate serving as base, as well as anode of the chamber. We are indebted to Mr. Julius Pearson of the instrument shop of this Institute for this detail of construction.

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Magnetic Properties of Iron Cobalt Multilayered Films Deposited by Opposed Targets Sputtering

FefCo multilayered films with about 3 000 A thick have been deposited by an opposed targets sputtering apparatus. The films with deposition period dlayer above 10 A have layered structure. Their magnetic properties changes significantly with dl, and the film with dlayer around 60 A has the lowest coercive force of about 6 Oe and saturation magnetization about 1 600 emufcc.

متن کامل

Differential Sputtering Behavior of Pyrolytic Graphite and Carbon-Carbon Composite Under Xenon Bombardment

A differential sputter yield measurement technique is described, which consists of a quartz crystal monitor that is swept at constant radial distance from a small target region where a high current density xenon ion beam is aimed. This apparatus has been used to characterize the sputtering behavior of various forms of carbon including polycrystalline graphite, pyrolytic graphite, and PVD-infilt...

متن کامل

THE ANALYSIS OF STRUCTURE FOR THE MULTI-LAYERED OF Ge/TiO2 FILMS PREPARED BY THE DIFFERENTIAL PRRESSURE CO-SPUTTERING ANALIZA STRUKTURY WIELOWARSTWOWYCH FILMÓW Ge/TiO2 WYTWARZANYCH METODĄ RÓŻNICOWO-CIŚNIENIOWEGO WSPÓŁROZPYLANIA JONOWEGO

We tried to fabricate the Ge/TiO2 composite films with the differential pressure (pumping) co-sputtering (DPCS) apparatus in order to improve the optical properties. In the study, the micro structure of these thin films has been evaluated. TEM image revealed that the thin film was alternately layered with TiO2 and Ge, lattice fringes were observed both of Ge layer and TiO2 layer. There were por...

متن کامل

MECHANICAL PROPERTIES AND MICROSTRUCTURE OF AlN/SiCN NANOCOMPOSITE COATINGS PREPARED BY R.F.-REACTIVE SPUTTERING METHOD WŁAŚCIWOŚCI MECHANICZNE I MIKROSTRUKTURA POWŁOK NANOKOMPOZYTOWYCH AlN/SiCN WYTWORZONYCH METODĄ REAKTYWNEGO ROZPYLANIA JONOWEGO RF FIn

FIn this work, AlN/SiCN composite coatings were deposited by r.f.-reactive sputtering method using a facing target-type sputtering (FTS) apparatus with composite targets consisting of Al plate and SiC chips in a gaseous mixture of Ar and N2, and investigated their mechanical properties and microstructure. The indentation hardness (HIT ) of AlN/SiCN coatings prepared from composite targets consi...

متن کامل

A Method for Gold Coating Experimental Detector Beampipes

A thin metallic coating is required on the inside of central detector beryllium beampipes at high-current ee colliders in order to suppress detector backgrounds that arise from scattered synchrotron radiation. As part of two CESR/CLEO upgrades, three beryllium beampipes have been coated with gold using a magnetron sputtering technique. The apparatus will be described as well as the factors that...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

عنوان ژورنال:

دوره   شماره 

صفحات  -

تاریخ انتشار 2003